The window of acceptable sheet resistance is shrinking with each technology node resulting in increasingly more rigorous standards for scale and accuracy of metrology tools. The shortcomings of traditional types of 4 point probes are becoming more and more evident. By developing the microRSP-M200, a unique tool for measuring the sheet resistance of conducting films, hereunder ultra shallow junctions (USJ’s), CAPRES A/S has responded to the growing need for reliable sheet resistance measurements on micro scale.
The microRSP-M200 by CAPRES A/S is a unique R&D tool for sheet resistance measurements of conductive surfaces in micro scale. Like the microRSP-A300 by CAPRES A/S, the microRSP-M200 makes use of the Micro 4-Point Probe characterised by having a probe pitch of 1000 times smaller pin spacing/pitch than that of conventional probes. This narrow design allows the microRSP to uncover significant thin film characteristics of determining factor in relation to properties and functionality of thin films and end products. Features of the microRSP-M200:
Accurate and reliable surface resistivity measurements for R&D purposes
Micro scale resolution revealing microscopic process artifacts
Wide range of applications (USJ, Silicides, Metal films, Pocket implant etc.)