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Markets
Metrology in Semiconductor and
Digital Storage manufacturing
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References
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- IBM Corporation, Global Research (Yorktown Heights, USA)
- University of Copenhagen, Department of Chemistry (Copenhagen, Denmark).
- JEOL Ltd. (Akishima, Japan)
- University of Tokyo, Department of Physics (Tokyo, Japan)
- Headway Technologies (Milpitas, USA)
- Canon-ANELVA Corporation (Tokyo, Japan)
- Hitachi Global Storage Technologies (San José, USA)
- TDK Corporation (Nagano. USA)
- NEC Toshiba (Sagamihara, Japan)
- Fujitsu Laboratories (Atsugi, Japan)
- Hitachi GST (Odawara, Japan)
- Applied Materials (Sunnyvale, USA)
- ALPS (Nagaoka, Japan)
- Toshiba (Kawasaki, Japan)
- NIST - National Institute of Standards and Technology (Gaithersburg, USA)
- AIST - National Institute of Advanced Industrial Science and Technology (Tsukuba, Japan)
- Grandis, Inc. (Milpitas, USA)
- Crocus Technology (Grenoble, France)
- IMEC vzw (Leuven, belgium)
- Singulus Nano Deposition Technologies GmbH (Kahl am Main, Germany)
- Max-Planck-Institut für Microstructurphysik (Halle, Germany)
- IFW Dresden (Germany)
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News
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Publication 2012-06-21
Microprobe Metrology for direct Sheet Resistance and Mobility characterization.
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