Markets

 

Metrology in Semiconductor and

Digital Storage manufacturing

 

 
 
 
 

 

References

 
 

  • IBM Corporation, Global Research (Yorktown Heights, USA)
  • University of Copenhagen, Department of Chemistry (Copenhagen, Denmark).
  • JEOL Ltd. (Akishima, Japan)
  • University of Tokyo, Department of Physics (Tokyo, Japan)
  • Headway Technologies (Milpitas, USA) 
  • Canon-ANELVA Corporation (Tokyo, Japan) 
  • Hitachi Global Storage Technologies (San José, USA)
  • TDK Corporation (Nagano. USA)
  • NEC Toshiba (Sagamihara, Japan)
  • Fujitsu Laboratories (Atsugi, Japan)
  • Hitachi GST (Odawara, Japan)
  • Applied Materials (Sunnyvale, USA)
  • ALPS (Nagaoka, Japan)
  • Toshiba (Kawasaki, Japan)
  • NIST - National Institute of Standards and Technology (Gaithersburg, USA)
  • AIST - National Institute of Advanced Industrial Science and Technology (Tsukuba, Japan)
  • Grandis, Inc. (Milpitas, USA)
  • Crocus Technology (Grenoble, France)
  • IMEC vzw (Leuven, belgium)
  • Singulus Nano Deposition Technologies GmbH (Kahl am Main, Germany)
  • Max-Planck-Institut für Microstructurphysik (Halle, Germany)
  • IFW Dresden (Germany)
     
     

News

Publication
2012-06-21
    Microprobe Metrology for direct Sheet Resistance and Mobility characterization.

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